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Double-sided polishing unit - List of Manufacturers, Suppliers, Companies and Products

Double-sided polishing unit Product List

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Double-sided polishing system 'EJD-6BY'

Birth of a multifunctional compact CMP-compatible double-sided polishing device!

A compact and multifunctional CMP-compatible double-sided polishing device in size 6B has been developed from the "Trinity-Y" series. It is made with a full stainless steel dust cover and thoroughly uses corrosion-resistant materials throughout, making it suitable for all types of slurries and ideal for simultaneous double-sided polishing of difficult-to-machine materials. Additionally, by combining it with other Trinity-Y models, space-saving can be achieved, allowing for the construction of a highly functional processing system without waste.

  • Wafer processing/polishing equipment

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